Abstract

AbstractCdTe films have been prepared by a close-spaced sublimation (CSS) process with screenprinted CdTe layers as a source. The electrical resistivity of the CdTe film deposited in O2 was about one order of magnitude lower than that of the film deposited in He. The Cd content in the CdTe films deposited in O2 was smaller than that in the CdTe films deposited in He. No oxygen was detected in the CdTe films deposited in O2. As the Cd/Te ratio decreased, the resistivity of the CdTe films decreased and reached at about 3×104 Ω2.cm. The resistivity decrease by oxygen flow was diminished when the CdTe composition was limited by solid solubility. The above results indicated that the resistivity decrease of CdTe films deposited in O2 was not by due to the oxygen doping but by due to the CdTe stoichiometry change.

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