Abstract
Turbomolecular pumps (TMPs) are widely used in the semiconductor and thin film industries. In order to prevent corrosion on TMPs, it is sometimes coated with ceramic (SiO2) film. The coated film changes surface roughness of the blades, and it is considered to influence on the pumping performance. The effect of surface roughness of the blades on the pumping performance is studied experimentally. First, the maximum compression ratio and pumping speed factor are measured for the non-coated TMP. Next, the TMP coated with SiO2 is tested. The experimental results showed that the blade surface roughness changed by SiO2 coating improved the pumping performance.
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