Abstract
An X-ray diffraction method was used to study the formation of the crystallographic texture of vacuum ion-plasma TiN and ZrN coatings depend on the bias voltage on the substrate. It is shown that, at high values of the bias voltage (-100 V), a pronounced texture forms in TiN coatings and a two-component (111) + (113) texture in ZrN coatings. A decrease of the bias voltage to –10 V leads to a twofold increase in the hardness of the coatings, a non-texture state of TiN, and a weakening of the texture of ZrN coatings.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: IOP Conference Series: Materials Science and Engineering
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.