Abstract

In order to obtain pressureless-sintered SiC ceramics with high thermal conductivity, effect of BeO addition on sintering properties boron-doped β-SiC powder was investigated. The β-SiC powder was produced by the plasma arc method from SiH4, B2H6 and CH4 gases. Pressureless-sintered boron-doped β-SiC ceramics showed high thermal conductivity of 180 W·m-1·K-1 and electrical resistivity of 1100Ω·m (10mV). On the other hand, pressureless-sintered boron-doped β-SiC ceramics containing BeO showed varistor characteristics with electrical resistivity of 1011Ω·m at 10V, and thermal conductivity of 230 W·m-1·K-1. These ceramics consisted of net-like elongated β-SiC grains. Thus, addition of BeO increased the thermal conductivity and electrical resistivity.

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