Abstract
Highly transparent ZnO thin films were grown by chemical vapor deposition (CVD) on glass substrates at various substrate temperatures and sample positions inside the deposition chamber. The optical properties of the films were investigated. Optimized ZnO films have an average transmission in the visible range is about 90% at substrate temperature 500 ºC and the optical energy gap is 3.2 eV. It was also found that the best position of the films inside the chamber is about 16 cm from the inlet side of the gases.
Highlights
Highly transparent ZnO thin films were grown by chemical vapor deposition (CVD) on glass substrates at various substrate temperatures and sample positions inside the deposition chamber
على أرضيات زجاجيـة بواسـطةZnO تم تحضير أغشية رقيقة من اوكسيد الزنك تم دراسة تأثير درجة حرارة الأرضـية وموقعهـا داخـل.تقنية الترسيب البخاري الكيميائي حجرة الترسيب على خصائصها البصرية ومن خلالها حصلنا على أعلى قيمة للنفاذيـة عنـد 550 oC وعند رفع درجة الحرارة إلـى90% وكانت قيمتها حوالي500 oC درجة حرارة إلى3.1 eV فجوة الطاقة البصرية للأغشية ازدادت من.75% تناقصت النفاذية إلى حوالي أما بخصوص تأثير الموقع على نفاذية الأغـشية. عند رفع درجة حرارة الترسيب3.25 eV سم عن فوهة حجرة دخول الغازات قد أعطى أعلى قيمة16 المحضرة فكان الموقع الذي يبعد
Summary
Highly transparent ZnO thin films were grown by chemical vapor deposition (CVD) on glass substrates at various substrate temperatures and sample positions inside the deposition chamber.
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