Abstract
Results of investigations of the optical properties of amorphous and microcrystalline Si:H, Cl films obtained from an SiCl 4-H 2-Ar glow discharge are reported. It was found that both the crystallinity and the impurity content (hydrogen and chlorine), which are important in determining the optical properties, are strongly influenced by the addition of argon. In particular, a marked effect of the crystalline grain size on the degree of disorder is found.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
