Abstract
GaMnAs and Be-codoped GaMnAs films grown via molecular beam epitaxy (MBE) were heat treated and the stability of Mn in the matrix was investigated. MnAs had a stable phase at the low growth temperature, but MnGa was stable at the annealing temperature. Be-codoping did not prevent the precipitation processes, but Be itself was stable during the annealing process to maintain the GaAs matrix at the high conductivity.
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