Abstract
Optical absorption in amorphous InGaZnO4films was examined by optical transmittance and photothermal spectroscopy using individual cantilever. The amorphous InGaZnO4films have optical bandgap of ~3.5 eV, and Urbach tail absorption and mid-gap absorption at 2.0-3.0 eV. Mid-gap absorption was reduced by thermal annealing at 300 °C in an atmosphere. This observation indicates that heat-induced structural change causes reduction of gap states in amorphous InGaZnO4films.
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