Abstract
The main purpose of this work is to evaluate, using a Monte Carlo simulation, the extent to which anisotropy in the elastic electron-neutral scattering cross sections influences the spatial distribution of the electron-impact ionization profile in glow discharges in argon. We also briefly discuss the effect of anisotropic elastic scattering on the slowing down of an electron beam and on the transmission factor, the fraction of electrons emitted from the cathode that are not scattered back to the cathode. Monte Carlo simulations were performed using different functional forms for the anisotropy. We show that, for a given momentum transfer cross section and the assumption of isotropic scattering, the ionization profiles over a range of conditions in argon glow discharges in parallel plane electrode geometries are not significantly affected by the inclusion of higher order anisotropies in the elastic cross sections. The anisotropy in the elastic scattering cross section influences only slightly the electron transmission factor for low, uniform electric fields.
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