Abstract
AbstractAluminium-doped zinc oxide (ZnO) films have been prepared by spray pyrolysis technique using the mixed solution of zinc acetate dihydrate and aluminium nitrate nonahydrate in methanol. Concentration of aluminum in the solution was varied in a range of 1, 3 and 5 atomic percents. The results from X-ray diffraction showed that the preferred orientation of ZnO films changed to the [002] direction when the concentration of aluminum in the solution exceeded 1 atomic percents. ZnO films deposited from the 3 atomic percent Al containing solution had the largest grains and showed the lowest resistivity of 75 Ω-cm. Addition of aluminum into the precursor solution shifted the absorption edge towards longer wavelengths.
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