Abstract
The amorphous TbFeCo films covered with the protective AlN films have been prepared by the rf magnetron sputtering system. It is found that the protective AlN films not only protect rare earth elements from oxidation and enhance magneto-optical Kerr effect but also affect the magnetic properties of the rare earth-transition metal films. The coercivity Hc and perpendicular magnetic anisotropy energy constants K'u1 and Ku2 of the films are changed with the thickness of the protective AlN films. It can be explained according to the stress mechanism and the model of single ion anisotropy.
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