Abstract

Nb/Al-AlOx/Nb superconducting tunnel junctions for the application of radiation detectors were fabricated using dc magnetron sputtering. The surface morphology of polycrystalline Nb films was observed using an atomic force microscope. Junctions with various Al film thicknesses were fabricated. The leakage current of the junctions is found to decrease as the Al thickness increases, indicating an improvement of the Al film coverage over the Nb surface. X rays were detected with the junctions prepared and the low leakage property across the junction makes possible x-ray detection with various size junctions up to 200×200 μm2.

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