Abstract
Hemispherical Resonator Gyroscope (HRG) is a high-precision angle sensor applied in inertial navigation systems. The quality factor of hemispherical resonator is directly related to the material intrinsic and extrinsic dissipation. The air pressure in vacuum package greatly affects the performance of the resonator and further deteriorates the accuracy of the HRG. Therefore, the vibration characteristics of resonators at different pressures need to be investigated. In this paper, theoretical analysis of the quality factor of resonators is proposed to characterize the relationship between quality factor and air damping coefficient. Measurement experiments are conducted to investigate the characteristics of the hemispherical shell resonator at different pressures. The resonant frequency and quality factor are measured with a laser Doppler vibrometer using ring-down time method at different pressures. The result indicates that resonant frequency and quality factor have different sensitivities to air pressure. Air damping coefficient is also calculated at different air pressure, which provides reference for simulation and theoretical analysis of the effects of air damping on resonators.
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