Abstract
The crystallization process of the Ag or Cu doped Sb/sub 2/Te/sub 3/ amorphous film was investigated by isothermal treatment for one hour at 100/spl deg/C, 200/spl deg/C and 300/spl deg/C respectively. The crystallization temperatures of Ag/sub 8.3/Sb/sub 34.9/Te/sub 56.8/ and Cu/sub 8.4/Sb/sub 35.1/Te/sub 56.5/ films determined by DSC analysis were more than 125/spl deg/C and 120/spl deg/C respectively, while that of the undoped Sb/sub 2/Te/sub 3/ film was 97/spl deg/C. It indicates that doping Ag or Cu can improve the room temperature stability of Sb/sub 2/Te/sub 3/ amorphous films. For pure and some Ag, Cu doped Sb/sub 2/Te/sub 3/ films, phase transformations from lower temperature metastable phases to higher temperature thermodynamic stable phases were found. This kind of phase transformation would cause the appearance of ambiguous exothermic peak in DSC curve. When the Ag content is increased to about 6.6 at%, the melting temperature of the film is enhanced from 415/spl deg/C for undoped film to higher than 450/spl deg/C. For the Cu doped film, same tendency can be achieved as Cu content is increased to 8.4 at%. The contrast ratios between as-deposited and 300/spl deg/C annealed films of Ag/sub 3.2/Sb/sub 35.8/Te/sub 61.0/ and Cu/sub 41/Sb/sub 37.4/Te/sub 58.5/ films were more than 42% and 37% respectively.
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