Abstract
The effect of additives on the viscosity of liquid‐phase dimethylaluminum hydride (DMAH) was investigated. The viscosity of pure liquid DMAH was measured to be 6400 centipoise (cP) and due to its high viscosity, it is difficult to vaporize DMAH effectively in a bubbler in the chemical vapor deposition of aluminum. N,N‐Dimethyl‐1‐naphthylamine and N‐ethyl‐N‐methylaniline were selected as an additive because they are a liquid at room temperature and have a high boiling point. The viscosity of DMAH was drastically reduced down to 6 cP with the addition of 3.2 mol % of N‐ethyl‐N‐methylaniline and 8 cP with the addition of 4.3 mol % of N,N‐dimethyl‐1‐naphthylamine.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.