Effect of Additives on the Viscosity of Liquid‐Phase Dimethylaluminum Hydride

Abstract

The effect of additives on the viscosity of liquid‐phase dimethylaluminum hydride (DMAH) was investigated. The viscosity of pure liquid DMAH was measured to be 6400 centipoise (cP) and due to its high viscosity, it is difficult to vaporize DMAH effectively in a bubbler in the chemical vapor deposition of aluminum. N,N‐Dimethyl‐1‐naphthylamine and N‐ethyl‐N‐methylaniline were selected as an additive because they are a liquid at room temperature and have a high boiling point. The viscosity of DMAH was drastically reduced down to 6 cP with the addition of 3.2 mol % of N‐ethyl‐N‐methylaniline and 8 cP with the addition of 4.3 mol % of N,N‐dimethyl‐1‐naphthylamine.