Abstract
ZnO films consisting of nanoparticles were obtained by the sol–gel dip-coating method using citric acid and ethylenediaminetetraacetic acid (EDTA) as additives. The size of the nanoparticles was decreased by using the additives, and continuous ZnO films were formed when citric acid was added to a precursor solution. The crystallinity of the ZnO films depended on the additives and pre-annealing temperature to dry the precursor solution. When the pre-annealing temperature was at 260 °C, ZnO films with preferred c-axis orientation were obtained regardless of the additives. At the pre-annealing temperature of 120 °C, the additives prevented the crystallization of ZnO. The ZnO film pre-annealed at 120 °C was directly patterned by light irradiation from a high-pressure mercury lamp during pre-annealing. EDTA in the precursor solution improved the patterning selectivity.
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