Abstract
Undoped and indium doped zinc oxide (ZnO) transparent conductive oxide were prepared by a low-cost Ultrasonic Spray Pyrolysis. The influence of acetic acid on properties of the ZnO thin films was investigated. The complex formed by [CH 3COO −] and [Zn 2+] in precursor solution was better for the growth of ZnO film. The acetic acid added in precursor solution can supply [CH 3COO −] for both [Zn 2+] and [In 3+] to form complexes. That made the [Zn 2+] and [In 3+] have similar statement, which can promote the indium doping in the ZnO films. The surface morphology, structural and electrical properties of the ZnO thin films were influenced by the acetic acid adding. The total transmittance of the ZnO thin films is above 80% in the wide wavelength region from 400 nm to 2000 nm.
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