Effect of abrasive particle size on tribochemical wear of monocrystalline silicon

Abstract

Using atomic force microscopy, the nanowear of hydrogen-terminated silicon surface was investigated in water with spherical SiO2 tips. The radii of tips can significantly affect the material removal of silicon surface and large tip could result in substantial wear and high friction force. Analysis suggests that the increase in contact area could enhance the tribochemical reaction by forming more Si-O-Si bonding bridges at Si/SiO2 interface. Thus, for the tribochemical wear of silicon under elastic contact condition, the abrasive particle size dependence of material removal was more attributable to the change of contact area than to the change of indentation volume. These results may help gain a profound insight into the influence of abrasive particle size on tribochemical wear of silicon.