Abstract
A confocal Raman investigation of Pb 1 − x La x Ti 1 − x/4 O 3 (PLT) thin films grown by RF magnetron sputtering on PbO x /Pt/Ti/SiO 2/Si substrates with an intermediate LaSrCoO 3 (LSCO) layer was performed. The influence of the LaSrCoO 3 buffer layer was analyzed taking advantage of the observed Raman spectral band variation, which varied according to different manufacturing procedures. In the presence of a LSCO layer, the A1(1TO) Raman mode, which was indicative of tetragonal distortion, was pronouncedly enhanced, and a slight deviation from the (0 0 1) plane of the film was observed from the angular dependence of the polarized Raman spectral intensity. Furthermore, the spectral band variation as well as the residual stress along the in-depth direction was measured in the film from cross-sectional spectral line scans. This latter measurement showed a relaxation of the lattice mismatch in the presence of LSCO and PbO layers.
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