Abstract
Sol–gel tetramethoxyorthosilicate (TMOS) derived composite thin films comprising embeddedNiCl2 nanoparticles, were illuminated and processed by 193 and 157 nm excimer laser radiation.The effect of different laser fluences of 193 nm and the number of 157 nm pulses on thematerial surface was studied. Atomic force microscopy imaging was used to evaluate theeffects of the irradiation. It was found that surface morphology was modified in acontrollable way, with physical and chemical properties strongly depending on theillumination conditions. Ablative ultraviolet laser surface processing is a generic single-stepapproach that can be applied successfully in composite materials. Applications involvemicro/nanostructure formation for use in hybrid photonic and optoelectronic devices andother applications.
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