Abstract
Conventional parallel detectors for Electron Energy Loss Spectroscopy (EELS) have been mainly based upon systems using linear photodiode arrays in a conjugate image plane of an electron spectrometer. We have developed a unique two dimensional charge coupled device (CCD) camera system which can be used as a detector for EEL spectroscopy and imaging, utilizing high sensitivity, high resolution CCD's, which are typically used in medial or astronomic imaging.The present detector system is based upon a Tektronics TK512M 512 x 512 pixel CCD array, (figure 1) which is optically coupled to a YAG:Ce single crystal scintillator. This CCD imaging system views an electron energy loss spectrum which is magnified by a quadrupole doublet lens attached to a Gatan 607 electron spectrometer on a Philips EM420 TEM as is illustrated in figure 2. The CCD controller, detector head electronics and electron optics were developed at Argonne specifically for high speed data acquisition and allow the recording of complete spectra in as short a time as 10 μsec or approximately 103times faster than the typical 1024 pixel photodiode arrays’ thus allowing the potential for time resolved spectroscopy.
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