Abstract
Elimination of the sources of EDS spectral contamination in the Philips EM-301 ASTEM is particularly difficult due to the limited space available between the objective lense pole pieces. Into this space must go a sample holder, a cold finger decontamination device, an objective aperture, a backscattered electron detector (if used) and, of course, the sample, often supported by a grid. The EDS detector should be placed as close to the sample as possible, further reducing the space available.All of these, including the pole pieces, can result in unwanted systematic peaks in EDS spectra.An earlier paper described the design and use of an A1 sample holder and cold finger. The use of A1 was satisfactory, except that the resulting aluminum peak precluded the analysis of A1 samples and interferred with the Si peak if present. A Be holder, similar in design to the A1 holder (1), was built.
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More From: Proceedings, annual meeting, Electron Microscopy Society of America
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