Abstract
in “traditional” micromachining. Special focus was given on NanoImprint Technologies demonstrating novel possibilities in structural patterning with nanometer dimensions. In addition, two sessions focused on applications in the areas of photonics and micro optics, RF-MEMS, and micro fluidics for life science and microreactor applications. The workshop featured 45 oral presentations and more than 80 posters from 12 different countries from all over the world. With more than 150 participants it was highly successful and continued the tradition of the timely dissemination of cutting edge technologies. This special issue of Microsystem Technologies is presenting a subset of 49 reviewed and finally accepted HARMNST 2013 contributions. It follows the traditional cooperation between Springer and the HARM(N)ST Advisory Committee publishing the most relevant workshop contributions.
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