Abstract

The fabrication and characteristics of edge-emitting microlasers with deeply etched distributed Bragg reflector (DBR) mirrors are presented. Using reactive ion etching, the mirrors are formed at both cavity ends of a ridge waveguide laser with an GaInAs-AlGaAs single-quantum-well active layer. The devices have continuous-wave threshold currents as low as 2 and 6 mA at cavity lengths of 80 and 40 μm, respectively. Lasing operation is achieved down to a length of 28 μm. Diffraction limited reflectivities >75% are obtained for third-order gratings, with two DBR periods.

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