Edge effect modeling of small tool polishing in planetary movement

Abstract

As one of the most challenging problems in Computer Controlled Optical Surfacing (CCOS), the edge effect greatly affects the polishing accuracy and efficiency. CCOS rely on stable tool influence function (TIF), however, at the edge of the mirror surface,with the grinding head out of the mirror,the contact area and pressure distribution changes, which resulting in a non-linear change of TIF, and leads to tilting or sagging at the edge of the mirror. In order reduce the adverse effects and improve the polishing accuracy and efficiency. In this paper, we used the finite element simulation to analyze the pressure distribution at the mirror edge and combined with the improved traditional method to establish a new model. The new method fully considered the non-uniformity of pressure distribution. After modeling the TIFs in different locations, the description and prediction of the edge effects are realized, which has a positive significance on the control and suppression of edge effects. © 2018 SPIE.