Abstract
The perhydropolysiloxazane (PHPS) solution has been widely used in the spin-on-dielectric (SOD) process to form silicon oxide layer on a wafer in semiconductor industries. To reduce the whole semiconductor manufacturing cost, the process of PHPS solution production requires high productivity as well as low production cost. A large portion of the PHPS solution production cost is attributed to the large usage of solvents (pyridine and xylene), because more than 20 times of solvents in mass are required to produce a unit mass of high purity PHPS solution. Therefore, we suggest several plausible solvent regeneration processes of organic solvent waste from the PHPS solution production, and their economics is evaluated for comparison.
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