EBSD 기법을 이용한 Gamma TiAl의 마이크로 조직파괴에 관한 연구

Abstract

A backscatter Kikuchi diffraction attachment to an SEM enables the convenient investigation of grain orientations on bulk or micro surface. Their relation to micro?structural features gives insight into many aspects of anisotropic materials properties. In micro area such as Micro Electro Mechanical Systems(MEMS) devices is required in order to improve understanding of how they may be expected to perform upon the micro?scale. Electro Back Scatter Diffraction (EBSD) helps us to find uniform area as MEMS material. The γ-TiAl has two different lamellar structures γ/α₂?Ti3Al phase which have shows {111} γ//{0001}α₂ plane indexing. The micro?size testing specimen was successfully made by this structural relation. Interlamellar structure specimen averagely show 20~25% lower fracture toughness value compare with translamellar specimens. Moreover micro fracture surface and micro crack progress were observed.