Abstract

The chemical reactions and the dissolution properties of homopolymeric PMMA and a P(MMA-co-MAA) copolymer were investigated during DUV (KrF, 248 nm) and e-beam exposure. The chain scission reaction was analyzed using GPC. The polymer degradation reaction is very similar at both exposure procedures. In both cases a bimodal and, later, a multimodal character of the molecular weight distribution is observed.

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