Abstract
The fabrication and reproducibility of stable metal (M) contacts to compound semiconductor (AB) devices are largely dependent on the knowledge or ability to predict both the phase formation sequence and the phases that are finally in thermodynamic equilibrium within the substrate at any given temperature. In addition to forming stable and metastable ternary phases, these M-AB reactions (particularly the Ni-InP and Pd-InP systems) are prime candidates for solid-state amorphization reactions. Hence, thermodynamic data from the binary M-A and M-B systems are insufficient to predict the compounds that will form during these M-AB reactions. In this paper, the formation of the initial products of the M-AB (M=Ni, Pd) reactions were characterized by TEM, energy dispersive x-ray microanalysis and in-situ heating experiments.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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