Abstract
Nanomanufacturing tools that can be used in nanofactory were fabricated by focused-ion-beam chemical vapour deposition (FIB-CVD). A nanomanipulator was fabricated in this study, and the nanoparts manipulation was demonstrated using a nanomanipulation system integrated in an FIB system. Furthermore, a glass-capillary-based local field emitter was developed for a spot deposition, and the field emission was confirmed. These nanomanufacturing tools were made of diamond-like carbon (DLC). Therefore, material characteristics, such as fine structure, mechanical properties and electrical properties, DLC deposited by FIB-CVD were examined. These results indicated that the FIB-CVD is a useful fabrication technology to achieve the novel nanomanufacturing tools.
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Schedule a callMore From: Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
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