Abstract
Ceramics have many characteristics in excellent mechanical, electrical and thermal properties. Therefore they have been applied in many fields. However, it is very difficult to machine them precisely by mechanical machining method because of their hardness and brittleness, and also surface polishing is not easy. In this report, the applicability of large-area EB irradiation to surface finishing and surface modification of ceramics is discussed. As a result, surface smoothing was difficult but the repellency and the releasability of resin from ceramics surface could be improved under proper EB conditions.
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