E-mode All-GaN-Integrated cascode MISHEMT with GaN/InAlGaN/GaN backbarrier for high power switching performance: Simulation study

Abstract

In this work, simulation-based research work based on a novel All-GaN-Integrated Cascode (AGC) MISHEMT with quaternary layer InyAlxGa1-x-yN as backbarrier has been investigated. The AGC-MISHEMT device consists of series combination of enhancement mode (recessed gate MISHEMT) and depletion-mode (MIS-gate) GaN devices with GaN/InAlGaN/GaN sandwich back barrier (SW-BB). TCAD simulations indicate that AGC-MISHEMTs with sandwich back barrier (SW-BB) exhibits simultaneous improvement in terms of drain current density (267 ​mA/mm), high ION/IOFF ratio (108), transconductance-peak (191 ​mS/mm) and breakdown voltage (371 ​V) as compared to AGC-MISHEMT with GaN buffer. The impact of varying mole fractions (x, y), thickness and position of InyAlxGa1-x-yN layer on breakdown voltage has also been examined. Improvement in drain current density up to 40% has been accomplished with increased gate oxide thickness under gate 2 (depletion-mode device) for AGC-MISHEMT with SW-BB. Besides, power switching performance has been compared for AGC-MISHEMT with SW-BB to that of AGC-MISHEMT with GaN buffer and Recessed Single Gate (RSG) MISHEMT for inductive load circuit. Significant reduction in power switching losses (i.e. 43% during turn-ON time and 87% during turn-OFF time) has been observed for AGC-MISHEMT with SW-BB as compared to RSG-MISHEMT. In addition, introduction of quaternary InAlGaN layer in backbarrier for AGC-MISHEMT also results in considerable degradation (∼89%) in power loss when input gate is in OFF-state due to improved ION/IOFF ratio in contrast with recessed single gate device.