Dynamics of the ion energy spectrum in EUV-induced hydrogen plasma

Abstract

The dynamics of the ion energy spectrum in low-pressure (10–100 Pa) hydrogen plasma induced by extreme ultraviolet (EUV) pulses in the wavelength range of 10–20 nm was studied experimentally. The plasma was generated under cathode irradiation due to both direct gas ionization by EUV photons and impact ionization by high-energy secondary electrons. The dynamics of the spectra of ions incident on the cathode was measured using a time-resolved retarding field energy analyzer. It is shown that the ion spectrum dynamics is completely determined by the time evolution of the cathode sheath. At low gas pressures (<20 Pa), the ion spectrum at early moments after the EUV pulse has a peaked shape, typical of a collisionless plasma sheath, and is mainly determined by the cathode voltage. As the pressure increases, the peak broadens and low energy ions appear in the spectrum due to ion collisions in the cathode sheath. An increase in the role of collisions with decreasing plasma density is also observed in the time evolution of ion spectra.