DYNAMICS OF PLASMA IN A DUAL-FREQUENCY CAPACITIVE DISCHARGE IN AN AR/XE MIXTURE

Abstract

The spatiotemporal dynamics of the plasma of a symmetrical dual-frequency 81 MHz/1.76 MHz capacitive discharge under the in uence of a low-frequency eld of 1.76 MHz has been studied.Using the method of phase-resolved optical emission spectroscopy, the dynamics of the radiation intensity of argon and xenon in plasma was obtained.The electron energy distribution function at the center of the discharge was measured using a Langmuir probe and the electron density was measured using a microwave probe. The main result is the dynamics of the intensity ratios of the selected argon and xenon lines depending on di erent conditions: at pressures of 40, 200 and 400 mTorr, LF voltage amplitude of 100, 200 and 400 V, input power at 81 MHz of 3 W and 15 W. The dynamics of high-energy electrons is studied based on a two-temperature approximation of the electron energy distribution function.