Abstract
The dynamical behavior of micro-electro-mechanical systems (MEMS) with electrostatic coupling is studied. A nonlinear modal analysis approach is applied to decompose the partial differential equation into a set of ordinary differential equations. The stability analysis of the equilibrium points is investigated. The amplitudes of the harmonic oscillatory states in the triple resonant states are obtained and discussed. Chaotic behavior is investigated using bifurcations diagram and the largest Lyapunov exponent. The dynamics of the MEMS with multiple functions in series is also investigated as well as the transitions boundaries for the complete synchronization state in a shift-invariant set of coupled MEMS devices.
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