Abstract
With increasing measuring speeds, the dynamics performances of probes have become a non-negligible factor affecting the measurement accuracy of measuring machines. In this research, the structure and force of a scanning probe on a gear measuring center (GMC) were analyzed, and a two-degree-of-freedom dynamics model was established as the equivalent model of the scanning probe. The equivalent mass, stiffness, and damping parameters of the probe system were determined based on physical experiments. The displacement data were measured with an involute master as the input of the probe system, and the dynamic response of the probe was obtained. The involute measurement results were compensated based on the dynamic response of the probe system. Experimental results showed that the proposed probe model could well describe the dynamics of the probe during the nonstationary motion and effectively compensate the dynamic error of the probe at different measuring speeds.
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