Dynamical theory of X-ray diffraction from damaged epitaxial layers with constant strain gradient

Abstract

Using the statistical approach to dynamical X-ray diffraction, we found the exact analytical solutions for coherently and incoherently scattered intensity from a damaged epitaxial layer with a constant strain gradient. These solutions and numerical methods were applied to simulations of rocking curves and scattered intensity distributions with depth. It is shown that rocking curves and X-ray intensity depth distributions have oscillatory structure due to the interference of scattered waves from different regions of a graded layer.