Abstract
This paper deals with the dynamics of a piecewise-smooth model used to represents the Tapping Mode Atomic Force Microscope behavior. Created by Binning et al (1986), Atomic Force Microscopy became a powerful tool in scanning probe process. A micro-cantilever vibrates, excited by a piezo electric transducer and its vibration is detected by a photo detector. Working close from its resonance, the micro-cantilever has a nonlinear behavior, due to this, chaotic behavior may occur. Represented by a piecewise SDOF system, the dynamics of the model are investigate via numerical simulations and the study of figures like, phase portrait, FFT, time history and Lyapunov exponent show evidences of chaotic oscillations of micro-cantilever tips in dynamic atomic force microscopy (AFM). This irregular behavior appears in a defined interval of time. Palavras-Chave: Atomic force microscopy, chaos.
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