Abstract

A general form for the intensity distribution of thermal diffuse scattering (TDS) is derived within the framework of quantum mechanics. The formulation takes into account the dynamical diffraction effects for both the initial and the final states of high-energy electrons and uses a single incoherent scattering approximation. When applied to estimate the intensity distribution of TDS in reflection high-energy electron diffraction (RHEED), using a two-wave approximation for the elastically scattered wave field, an analytical expression is obtained. It is shown that the dynamical diffraction effects may lead to an enhancement in the TDS intensities near the diffraction spots. The influence of correlated thermal atomic displacements on the contrast of the Kikuchi line parallel to the surface shadow edge has been discussed.

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