Dynamic wavefront measurement with a point diffraction interferometer based on birefringence polarization beam splitting.

Abstract

In this study, we proposed a point diffraction interferometer based on birefringence polarization beam splitting (BPBS-PDI) for transmission wavefront measurements. Using the polarization beam splitting property of birefringent crystals and a specially designed calcite crystal as a polarization beam splitter, two beams of linearly polarized light with orthogonal polarization directions and a small angular separation can be obtained to produce the reference and test beams with perpendicular polarization directions through a pinhole point diffraction plate. By introducing spatial synchronization phase-shifting technology, influencing factors such as environmental vibrations on the measurement results, are reduced. Subsequently, the birefringent crystal and system error calibration methods were studied. Finally, a BPBS-PDI experimental device was set up to obtain the wavefront distribution of the lens to be tested. The experimental results are consistent with those of the ZYGO interferometer, indicating that the BPBS-PDI wavefront measurement method can be used to measure a lens transmission wavefront with high accuracy.