Abstract
Robust metallizations for harsh environment and high current applications in integrated circuits are required for automotive or industrial applications. To achieve a higher current capability so called “power metals” are used. The new concept of slotted geometries shows a better robustness towards degradation due to electromigration. This is a new design concept which is contrary to the conventional concept to use homogeneous filled metal tracks. A reliability investigation of octahedron-shaped slots in metal tracks was carried out by dynamic simulations. The determination thermal–electrical–mechanical behaviour was simulated with the finite element software ANSYS®.
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