Dynamic Range Enhancement Via Linearized Output in Nanoelectromechanical Systems by Combining High-Order Harmonics

Abstract

There is a strong non-linearity between the field-emission current amplitude and field intensity. This nonlinearity degrades the dynamic range of digital signal processing in a mechanical oscillator composed of a cantilever. To solve this issue, we propose a linearization method by combining the harmonics of the field-emission current. The proposed method significantly increases the dynamic range. The nonlinearity error is <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$8.94\times 10^{-3}$ </tex-math></inline-formula> %FS for the proposed method, whereas it is 14.1%FS for the conventional method given by the 2nd harmonic current detection. In addition, the proposed method enables to rake up energy of the higher-order harmonics by utilizing our design framework for combining weights, thereby providing a constant derivative of the output current of the input electric field.