Dynamic Pull-In Investigation of a Clamped-Clamped Nanoelectromechanical Beam under Ramp-Input Voltage and the Casimir Force

Amir R Askari,Masoud Tahani

doi:10.1155/2014/164542

Abstract

The influence of the Casimir excitation on dynamic pull-in instability of a nanoelectromechanical beam under ramp-input voltage is studied. The ramp-input actuation has applications in frequency sweeping of RF-N/MEMS. The presented model is nonlinear due to the inherent nonlinearity of electrostatics and the Casimir excitations as well as the geometric nonlinearity of midplane stretching. A Galerkin based reduced order modeling is utilized. It is found that the calculated dynamic pull-in ramp input voltage leads to dynamic pull-in step input voltage by increasing the slope of voltage-time diagram. This fact is utilized to verify the results of present study.

Highlights

Nano/microelectromechanical systems (N/MEMS) are mostly used as sensors and actuators
In order to validate the model, the results are compared with those presented in the literature for DC dynamic pullin case in which the Casimir effect has been taken into account [8]. 0, and t0 =
In the present paper, reduced order modelling based on the Galerkin procedure was utilized to study the effect

Summary

Introduction

Nano/microelectromechanical systems (N/MEMS) are mostly used as sensors and actuators. Because of their small size, low power consumption, and the reliability of batch fabrications, there are lots of potential applications in engineering. One of the most important phenomena associated with electrostatically actuated N/MEMS is pull-in instability which occurs when input voltage exceeds its critical value. In this manner, the movable part is suddenly collapsed toward the substrate. Nathanson et al [1] and Taylor [2] have investigated this phenomenon experimentally This instability can occur in both static and dynamic circumstances. If the rate of applied voltage is negligible, the static pull-in instability may be observed; otherwise, one can observe DC dynamic pull-in

Methods

Results

Conclusion