Dynamic properties of symmetric optothermal microactuator

Abstract

This paper proposes a method of a symmetric optothermal microactuator (S-OTMA) directly driven by laser pulse. Based on the principle of thermal flux, a dynamic model is established describing the laser-induced optothermal temperature rise and optothermal expansion of the S-OTMA’s expansion arm. The dynamic optothermal expansion and the relationship between the expansion amplitude and laser pulse frequency are simulated, indicating that the expansion arm expands and reverts periodically with the same frequency of the laser pulse, and that the expansion amplitude decreases with the increase of laser pulse frequency. Experiments have been further conducted on a micro-fabricated S-OTMA under a laser pulse of 3.3 mW power and 2–18 Hz frequency. It is shown that the S-OTMA can periodically deflect in accordance with the same frequency of the laser pulse, with a maximum response frequency of at least 18 Hz. The maximum deflection (vibration) amplitude is measured to be 13.7 µm (at 2 Hz), and the amplitude decreases as the frequency increases. Both the theoretical model and experiments prove that the S-OTMA is capable of implementing direct laser-controlled microactuation in which only ~3 mW laser power is demanded. Furthermore, bi-directional actuation of the optothermal microactuator (such as S-OTMA) can be easily achieved by alternately irradiating either arm of the microactuator. This work may broaden the applications of the S-OTMA, as well as optothermal microactuators in MEMS/MOEMS and micro/nano-technology.