Abstract
The structure of a microresonator will affect the vibration characteristics and the performance of the system. Inspired by the structural characteristics of the human tympanic membrane, this paper proposed a microresonator with the bionic structure of a tympanic membrane. The structure of a tympanic membrane was simplified to a regular shape with three structural parameters: diameter, height, and thickness. To imitate the tympanic membrane, the contour surface of the bionic structure was modeled based on the formula of transverse vibration mode of a circular thin plate. The geometric model of the bionic structure was established by using the three structural parameters and the contour surface equation. The dynamic properties of the bionic model were studied by the finite element method (FEM). We discuss the modal characteristics of the bionic structure and study the effect of structural parameters and scale on the dynamic properties. The advantages of the bionic structure were investigated by a comparison with circular plate microresonators. The results illustrate that the bionic structure can significantly improve the resonant frequency and have a much larger effective area of vibration displacement.
Highlights
A microresonator is a typical high-precision MEMS component, which has excellent mechanical resonance characteristics and stable performance
The key point of modeling a reasonable bionic structure of the tympanic membrane is to design a contour surface by using the structural parameters
The bionic structure of the tympanic membrane can be regarded as a thin-walled rotating body, and its contour surface is very similar to the first-order transverse vibration mode of a circular plane constrained by fully clamped boundary conditions
Summary
A microresonator is a typical high-precision MEMS (microelectromechanical system) component, which has excellent mechanical resonance characteristics and stable performance. It is widely used in aerospace, precision measurement, national defense and military, communication, and other fields [1,2,3,4,5]. The main design parameters of a microresonator are resonance frequency, quality factor (Q), and energy conversion efficiency. For high-frequency and high-performance microresonators, the influence of geometric structure on resonant frequency, energy dissipation, and energy conversion efficiency should be considered in the design. The last section contains a few concluding remarks of this work
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