Abstract
This paper presents an integrated framework for the dynamic performance estimation (DPE) of mechatronic scanners in the design phase, which is based on frequency domain models of system components and signals in the system. It considers stochastic noise sources (e.g. sensor noise) as well as deterministic signals (e.g. reference trajectory) and propagates each signal to the desired performance output (e.g. actuator current) via obtained transfer functions. The framework is evaluated for a 2 inch fast steering mirror (FSM) dedicated as optical scanner by comparing estimated and measured values for positioning uncertainty, rms coil current and rms tracking error. The estimated positioning uncertainty for the FSM with a range of 52.4 mrad deviates only 0.74 µrad from the measured value. The estimated values for three tested raster trajectories also show good agreement with the measurements resulting in averaged relative deviations of 12% for the rms current values and between 15-17% for the rms tracking error.
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