Abstract
Dynamic measurement of surface profile is an important requirement in nondestructive testing, especially for the inspection of large samples with consecutive area scans or test objects under translation. In this paper, we propose the application of an eigenspace signal analysis method in diffraction phase microscopy for reliable and noncontact dynamic surface metrology. We also propose the inclusion of a graphics processing unit (GPU) computing framework in our method to enable fast interferogram processing for dynamics-based investigations. The practical viability of the proposed method is demonstrated for noninvasive nanoscale topography of a test target.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
