Abstract
A numerical simulation has been used to systematically investigate the characteristics of a stylus surface profiling instrument. The model bridges together previously used concepts to incorporate both tip size and tip dynamics. The dynamics incorporate a tip flight phenomenon, inferring detachment from zero value of the reaction force and the trajectory from a free vibration solution to a second order system. Tip shape is handled by a rigid kinematic model. Following brief discussions of the modelling and the process for generating test profiles with defined correlation lengths, the influences of the inherent parameters of the stylus instrument and the testing method on the measurement fidelity are examined. The tip shape effect of the stylus instrument is also considered in the dynamic measurement. It is noted that the finite tip size can increase the critical scanning speed to avoid tip flight, but decreases the signal fidelity of the measurement due to the bridging effect.
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