Dynamic modelling and mechanical analysis of an inertial linear piezoelectric actuator with double stators

Abstract

Abstract To achieve higher output performance in precision applications, and in order to gain deeper insight into operation principle, a dynamic model is established including the transmission relationship between the stators, the driving shaft, and the mover based on a slip-slip type inertial linear piezoelectric actuator with double stators. The influence of stator material and symmetry ratio of the excitation signal on the vibration characteristics of the stator and the output performance are investigated. This study reveals the relationship between these factors through a combination of simulations and experiments. Prototypes using several materials are machined and assembled, and the vibration characteristics and output performance are rigorously tested. The results obtained from the experimental measurements are consistent with the simulation results, confirming the validity and rationality of the dynamic model. The experimental results of the stator, as well as the actuator, are analyzed. It can be concluded that the actuator is able to output a larger effective displacement in one motion period with the increased symmetry ratio of the triangular wave signal, applied with a higher operating frequency, resulting in a higher output velocity of 42 mm/s and a larger load of 300 g with the steel stator, and a higher displacement resolution of 18 nm can be achieved using the AL alloy stator. This research not only provides an effective method for enhancing and selecting the desired output performance for the researched actuator but also can be extended to other slip-slip type inertial linear piezoelectric actuators.