Abstract

As the development of the ICPF (ionic conducting polymer films) actuator in MEMS, it has been one of the most interested materials due to its large bending deflection, high mechanical deformation, low excitation voltage, low density and manufacturing cost. In this paper, we will present the Cube Minimum Unit Model according to the hypothesis of considerable mechanical deformation principle of the ICPF actuator, and discuss the material relationships for ICPF actuator being recognized as a isotropic material, and show the equations of the forces, bending moment and transverse shear forces. We also give the electric field and stress analysis of the ICPF actuator based on the equivalent electrical circuit model and resolve the subject of output stress control based on the open-loop response. For the fish-like underwater microrobot, the ICPF actuated fish fin is an important mechanism, we will use ANSYS to give the dynamics analysis and improve the moving performance of the fish-like underwater microrobot by revising the shape of fish fin.

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